검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Absolute intensities of the vacuum ultraviolet spectra in a metal-etch plasma processing discharge Woodworth JR, Blain MG, Jarecki RL, Hamilton TW, Aragon BP Journal of Vacuum Science & Technology A, 17(6), 3209, 1999 |
| 2 |
Development of Neutral-Beam-Assisted Etcher Yunogami T, Yokogawa K, Mizutani T Journal of Vacuum Science & Technology A, 13(3), 952, 1995 |