검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Temperature dependence of precursor-surface interactions in plasma deposition of silicon thin films Bakos T, Valipa M, Aydil ES, Maroudas D Chemical Physics Letters, 414(1-3), 61, 2005 |
| No. | Article |
|---|---|
| 1 |
Temperature dependence of precursor-surface interactions in plasma deposition of silicon thin films Bakos T, Valipa M, Aydil ES, Maroudas D Chemical Physics Letters, 414(1-3), 61, 2005 |