검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Impact of stray light depending on image quality: An approximation using total integrated scatter Kim YC, De Bisschop P, Vandenberghe G, Van Den Hove L, Cho H, Moon J Journal of Vacuum Science & Technology B, 24(6), 2803, 2006 |
| 2 |
Dry development in an O-2/SO2 plasma for sub-0.18 mu m top layer imaging processes Goethals AM, Van Roey F, Sugihara T, Van den Hove L, Vertommen J, Klippert W Journal of Vacuum Science & Technology B, 16(6), 3322, 1998 |