화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Correlation between the OES plasma composition and the diamond film properties during microwave PA-CVD with nitrogen addition
Vandevelde T, Wu TD, Quaeyhaegens C, Vlekken J, D'Olieslaeger M, Stals L
Thin Solid Films, 340(1-2), 159, 1999
2 Optical emission spectroscopy of the plasma during microwave CVD of diamond thin films with nitrogen addition and relation to the thin film morphology
Vandevelde T, Nesladek M, Quaeyhaegens C, Stals L
Thin Solid Films, 308-309, 154, 1997
3 Optical-Emission Spectroscopy of the Plasma During CVD Diamond Growth with Nitrogen Addition
Vandevelde T, Nesladek M, Quaeyhaegens C, Stals L
Thin Solid Films, 290-291, 143, 1996