검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of the post dry-etch cleaning of silicon for Ti-self-aligned silicide technology Kim YB, Baklanov MR, Conard T, de Potter M, Vanhaeleemeersch S Journal of the Electrochemical Society, 146(4), 1549, 1999 |
| No. | Article |
|---|---|
| 1 |
Characterization of the post dry-etch cleaning of silicon for Ti-self-aligned silicide technology Kim YB, Baklanov MR, Conard T, de Potter M, Vanhaeleemeersch S Journal of the Electrochemical Society, 146(4), 1549, 1999 |