검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron-Beam Lithography of Curved Structures with an Enhanced Vector-Scan Pattern Generator Supporting Conic-Based Primitives Vasey F, Prongue D, Rothuizen H, Vettiger P Journal of Vacuum Science & Technology B, 12(6), 3460, 1994 |