검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Relationships between gas-phase film deposition, properties and structures of thin SiO2 and BPSG films Vassiliev VY Journal of the Electrochemical Society, 150(12), F211, 2003 |
| 2 |
Properties and gap-fill capability of HPD-CVD phosphosilicate glass films for subquarter-micrometer ULSI device technology Vassiliev VY, Lin C, Fung D, Hsieh J, Sudijono JL Electrochemical and Solid State Letters, 3(2), 80, 2000 |
| 3 |
Growth kinetics and deposition-related properties of subatmospheric pressure chemical vapor deposited borophosphosilicate glass film Vassiliev VY, Zheng JZ, Tang SK, Lu W, Hua J, Lin YS Journal of the Electrochemical Society, 146(8), 3039, 1999 |
| 4 |
Investigation of borophosphosilicate glass roughness and planarization with the atomic force microscope technique Tang SK, Vassiliev VY, Mridha S, Chan LH Thin Solid Films, 352(1-2), 77, 1999 |