검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma Bruce RL, Engelmann S, Lin T, Kwon T, Phaneuf RJ, Oehrlein GS, Long BK, Willson CG, Vegh JJ, Nest D, Graves DB, Alizadeh A Journal of Vacuum Science & Technology B, 27(3), 1142, 2009 |
| 2 |
Silicon etch in the presence of a fluorocarbon overlayer: The role of fluorocarbon cluster ejection Vegh JJ, Humbird D, Graves DB Journal of Vacuum Science & Technology A, 26(1), 52, 2008 |
| 3 |
Silicon etch by fluorocarbon and argon plasmas in the presence of fluorocarbon films Vegh JJ, Humbird D, Graves DB Journal of Vacuum Science & Technology A, 23(6), 1598, 2005 |