검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
25 nm mechanically buttressed high aspect ratio zone plates: Fabrication and performance Olynick DL, Harteneck BD, Veklerov E, Tendulkar M, Liddle JA, Kilcoyne ALD, Tyliszczak T Journal of Vacuum Science & Technology B, 22(6), 3186, 2004 |
| 2 |
Influence of sub-100 nm scattering on high-energy electron beam lithography Anderson EH, Olynick DL, Chao WL, Harteneck B, Veklerov E Journal of Vacuum Science & Technology B, 19(6), 2504, 2001 |
| 3 |
Substrate cooling efficiency during cryogenic inductively coupled plasma polymer etching for diffractive optics on membranes Olynick DL, Anderson EH, Harteneck B, Veklerov E Journal of Vacuum Science & Technology B, 19(6), 2896, 2001 |
| 4 |
Nanofabrication and diffractive optics for high-resolution x-ray applications Anderson EH, Olynick DL, Harteneck B, Veklerov E, Denbeaux G, Chao WL, Lucero A, Johnson L, Attwood D Journal of Vacuum Science & Technology B, 18(6), 2970, 2000 |