검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low temperature chemical vapor deposition of tungsten carbide for copper diffusion barriers Sun YM, Lee SY, Lemonds AM, Engbrecht ER, Veldman S, Lozano J, White JM, Ekerdt JG, Emesh I, Pfeifer K Thin Solid Films, 397(1-2), 109, 2001 |
| 2 |
Interfacial silicon oxide formation during synthesis of ZrO2 on Si(100) Sun YM, Lozano J, Ho H, Park HJ, Veldman S, White JM Applied Surface Science, 161(1-2), 115, 2000 |