검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Real-Time Investigation of Nucleation and Growth of Silicon on Silicon Dioxide Using Silane and Disilane in a Rapid Thermal-Processing System Hu YZ, Diehl DJ, Zhao CY, Wang CL, Liu Q, Irene EA, Christensen KN, Venable D, Maher DM Journal of Vacuum Science & Technology B, 14(2), 744, 1996 |