검색결과 : 24건
| No. | Article |
|---|---|
| 1 |
Study of porogen removal by atomic hydrogen generated by hot wire chemical vapor deposition for the fabrication of advanced low-k thin films Godavarthi S, Wang C, Verdonck P, Matsumoto Y, Koudriavtsev I, Dutt A, Tielens H, Baklanov MR Thin Solid Films, 575, 103, 2015 |
| 2 |
Impact of Plasma Pretreatment and Pore Size on the Sealing of Ultra-Low-k Dielectrics by Self-Assembled Monolayers Sun YT, Krishtab M, Struyf H, Verdonck P, De Feyter S, Baklanov MR, Armini S Langmuir, 30(13), 3832, 2014 |
| 3 |
Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance Marsik P, Urbanowicz AM, Verdonck P, De Roest D, Sprey H, Baklanov MR Thin Solid Films, 519(11), 3619, 2011 |
| 4 |
Influence of the ion bombardment of O-2 plasmas on low-k materials Verdonck P, Samara V, Goodyear A, Ferchichi A, Van Besien E, Baklanov MR, Braithwaite N Thin Solid Films, 520(1), 464, 2011 |
| 5 |
Effects of He Plasma Pretreatment on Low-k Damage during Cu Surface Cleaning with NH3 Plasma Urbanowicz AM, Shamiryan D, Zaka A, Verdonck P, De Gendt S, Baklanov MR Journal of the Electrochemical Society, 157(5), H565, 2010 |
| 6 |
Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation Marsik P, Verdonck P, De Roest D, Baklanov MR Thin Solid Films, 518(15), 4266, 2010 |
| 7 |
Modeling Fluid Flow Through Irregular Scaffolds for Perfusion Bioreactors Maes F, Ransbeeck P, Van Oosterwyck H, Verdonck P Biotechnology and Bioengineering, 103(3), 621, 2009 |
| 8 |
Deposition of silicon oxynitride at room temperature by Inductively Coupled Plasma-CVD Zambom LDS, Verdonck P Thin Solid Films, 515(2), 596, 2006 |
| 9 |
Blue cooperative luminescence properties in Yb3+ doped GeO2-PbO-Bi2O3 vitreous system for the production of thin films Cacho VD, Kassab LRP, Oliveira SL, Mansano RD, Verdonck P Thin Solid Films, 515(2), 764, 2006 |
| 10 |
Plasma etching of electrospun polymeric nanofibres Verdonck P, Caliope PB, Hernandez ED, da Silva ANR Thin Solid Films, 515(2), 831, 2006 |