검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Iridium/silicon capping layer for soft x-ray and extreme ultraviolet mirrors Prisbrey ST, Vernon SP, Clift WM Journal of Vacuum Science & Technology B, 23(6), 2378, 2005 |
| 2 |
Mask blanks for extreme ultraviolet lithography : Ion beam sputter deposition of low defect density Mo/Si multilayers Kearney PA, Moore CE, Tan SI, Vernon SP, Levesque RA Journal of Vacuum Science & Technology B, 15(6), 2452, 1997 |
| 3 |
Precision Optical Aspheres for Extreme-Ultraviolet Lithography Kania DR, Gaines DP, Sweeney DS, Sommargren GE, Lafontaine B, Vernon SP, Tichenor DA, Bjorkholm JE, Zernike F, Kestner RN Journal of Vacuum Science & Technology B, 14(6), 3706, 1996 |