검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
SiCxHy-based hydrophobic thin films with good chemical and mechanical properties synthesized by PECVD at various substrate temperatures Lee JS, Jin SB, Vichiansan N, Han JG, Hori M, Leksakul K Current Applied Physics, 15(11), 1342, 2015 |