검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
5 kV multielectron beam lithography: MAPPER tool and resist process characterization Rio D, Constancias C, Martin M, Icard B, van Nieuwstadt J, Vijverberg J, Pain L Journal of Vacuum Science & Technology B, 28(6), C6C14, 2010 |