검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Analysis of thermally activated kinetics and uniformity of photoresist ashing process on 300 mm wafers Mezerette DL, Tanimura K, Vinogradov GK Journal of Vacuum Science & Technology B, 27(5), 2084, 2009 |
| 2 |
Observations on the formation and ashing of giant folds in high dose ion-implanted resists Vinogradov GK, Menagarishvili VM Journal of Vacuum Science & Technology B, 17(1), 95, 1999 |
| 3 |
Probe diagnostics in a full wave resonator radio-frequency discharge Vinogradov GK, Menagarishvili VM, Yoneyama S Journal of Vacuum Science & Technology A, 16(3), 1444, 1998 |
| 4 |
Characterization of a novel lambda balanced inductive plasma source Vinogradov GK, Menagarishvili VM, Yoneyama S Journal of Vacuum Science & Technology A, 16(6), 3164, 1998 |
| 5 |
Plasma Polymerization of Acetylene in a Box-Type Radio-Frequency Gas-Discharge Reactor Under Plug-Flow Condition Uchida T, Vinogradov GK, Morita S Journal of the Electrochemical Society, 144(4), 1434, 1997 |
| 6 |
Plasma-Polymerized Acetylene Thin-Film by Pulsed Discharge Uchida T, Senda K, Vinogradov GK, Morita S Thin Solid Films, 281-282, 536, 1996 |