검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Evaluation of Plasma Damage Using Fully Processed Metal-Oxide-Semiconductor Transistors Li XY, Brozek T, Preuninger F, Chan D, Viswanathan CR Journal of Vacuum Science & Technology B, 14(1), 571, 1996 |
| 2 |
Comparison of Damage Created by a Chemical Downstream Etcher and Plasma-Immersion System in Metal-Oxide-Semiconductor Capacitors Brozek T, Dao T, Viswanathan CR Journal of Vacuum Science & Technology B, 14(1), 577, 1996 |