검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist Winston D, Cord BM, Ming B, Bell DC, DiNatale WF, Stern LA, Vladar AE, Postek MT, Mondol MK, Yang JKW, Berggren KK Journal of Vacuum Science & Technology B, 27(6), 2702, 2009 |
| 2 |
Characterization of prototype silicon pitch artifacts fabricated by scanning probe lithography and anisotropic wet etching Chien FSS, Hsieh WF, Gwo S, Jun J, Silver RM, Vladar AE, Dagata JA Journal of Vacuum Science & Technology B, 23(1), 66, 2005 |
| 3 |
Advanced electron microscopy needs for nanotechnology and nanomanufacturing Postek MT, Villarrubia JS, Vladar AE Journal of Vacuum Science & Technology B, 23(6), 3015, 2005 |