검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Interactions in Swiss households' energy demand: A holistic approach Tilov I, Farsi M, Volland B Energy Policy, 128, 136, 2019 |
| 2 |
Parallel proximal probe arrays with vertical interconnections Sarov Y, Frank A, Ivanov T, Zollner JP, Ivanova K, Volland B, Rangelow IW, Brogan A, Wilson R, Zawierucha P, Zielony M, Gotszalk T, Nikolov N, Zier M, Schmidt B, Kostic I Journal of Vacuum Science & Technology B, 27(6), 3132, 2009 |
| 3 |
Nanostructuring of Mo/Si multilayers by means of reactive ion etching using a three-level mask Dreeskornfeld L, Haindl G, Kleineberg U, Heinzmann U, Shi F, Volland B, Rangelow IW, Majkova E, Luby S, Kostic, Matay L, Hrkut P, Hudek P, Lee HY Thin Solid Films, 458(1-2), 227, 2004 |
| 4 |
Heavy ion projection beam system for material modification at high ion energy Weidenmuller U, Meijer J, Stephan A, Bukow HH, Sossna E, Volland B, Rangelow IW Journal of Vacuum Science & Technology B, 20(1), 246, 2002 |
| 5 |
Field emission arrays by silicon micromachining Debski T, Volland B, Barth W, Shi F, Hudek P, Rangelow IW, Grabiec P, Studzinska K, Zaborowski M, Mitura S Journal of Vacuum Science & Technology B, 18(2), 896, 2000 |
| 6 |
Fabrication of open stencil masks with asymmetric void ratio for the ion projection lithography space charge experiment Volland B, Shi F, Heerlein H, Rangelow IW, Hudek P, Kostic I, Cekan E, Vonach H, Loeschner H, Horner C, Stengl G, Buschbeck H, Zeininger M, Bleeker A, Benschop J Journal of Vacuum Science & Technology B, 18(6), 3202, 2000 |
| 7 |
Dry etching with gas chopping without rippled sidewalls Volland B, Hudek FS, Heerlein H, Rangelow IW Journal of Vacuum Science & Technology B, 17(6), 2768, 1999 |
| 8 |
Experimental results of the stochastic Coulomb interaction in ion projection lithography de Jager PWH, Derksen G, Mertens B, Cekan E, Lammer G, Vonach H, Buschbeck H, Zeininger M, Horner C, Loschner H, Stengl G, Bleeker AJ, Benschop J, Shi F, Volland B, Hudek P, Heerlein H, Rangelow IW, Kaesmaier R Journal of Vacuum Science & Technology B, 17(6), 3098, 1999 |
| 9 |
Comparison of silicon stencil mask distortion measurements with finite element analysis Ehrmann A, Struck T, Chalupka A, Haugeneder E, Loschner H, Butschke J, Irmscher M, Letzkus F, Springer R, Degen A, Rangelow IW, Shi F, Sossna E, Volland B, Engelstad R, Lovell E, Tejeda R Journal of Vacuum Science & Technology B, 17(6), 3107, 1999 |
| 10 |
Micromachined ultrasharp silicon and diamond-coated silicon tip as a stable field-emission electron source and a scanning probe microscopy sensor with atomic sharpness Rangelow IW, Shi F, Hudek P, Grabiec P, Volland B, Givargizov EI, Stepanova AN, Obolenskaya LN, Mashkova ES, Molchanov VA Journal of Vacuum Science & Technology B, 16(6), 3185, 1998 |