검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fluorine clustering and diffusion in silicon: Ab initio calculations and kinetic Monte Carlo model Vollenweider K, Sahli B, Zographos N, Zechner C Journal of Vacuum Science & Technology B, 28(1), C1G1, 2010 |
| No. | Article |
|---|---|
| 1 |
Fluorine clustering and diffusion in silicon: Ab initio calculations and kinetic Monte Carlo model Vollenweider K, Sahli B, Zographos N, Zechner C Journal of Vacuum Science & Technology B, 28(1), C1G1, 2010 |