검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Tetrachlorosilane consumption in radio frequency glow discharge Blinov LM, Golovkin AG, Kaganov LI, Oparin VB, Razhavski AA, Shterenberg AM, Volodko VV, Zyn VI Plasma Chemistry and Plasma Processing, 18(4), 509, 1998 |
| No. | Article |
|---|---|
| 1 |
Tetrachlorosilane consumption in radio frequency glow discharge Blinov LM, Golovkin AG, Kaganov LI, Oparin VB, Razhavski AA, Shterenberg AM, Volodko VV, Zyn VI Plasma Chemistry and Plasma Processing, 18(4), 509, 1998 |