화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Quantitative analysis of surface contaminants on silicon wafers by means of TOF-SIMS
Rostam-Khani P, Philipsen J, Jansen E, Eberhard H, Vullings P
Applied Surface Science, 252(19), 7255, 2006
2 Quantification issues of trace metal contaminants on silicon wafers by means of TOF-SIMS, ICP-MS, and TXRF
Rostam-Khani P, Hopstaken MJP, Vullings P, Noij G, O'Halloran O, Claassen W
Applied Surface Science, 231-2, 720, 2004