화학공학소재연구정보센터
검색결과 : 10건
No. Article
1 Application of synchrotron radiation to TXRF analysis of metal contamination on silicon wafer surfaces
Pianetta P, Baur K, Singh A, Brennan S, Kerner J, Werho D, Wang J
Thin Solid Films, 373(1-2), 222, 2000
2 Chemical structure and surface phonons associated with H on Si
Watanabe S
Journal of Chemical Physics, 108(14), 5965, 1998
3 A comparative electrchemical study of copper deposition onto silicon from dilute and buffered hydrofluoric acids
Li G, Kneer EA, Vermeire B, Parks HG, Raghavan S, Jeon JS
Journal of the Electrochemical Society, 145(1), 241, 1998
4 Atomic-Force Microscopy Study of the Silicon Doping Influence on the First Stages of Platinum Electroless Deposition
Gorostiza P, Diaz R, Servat J, Sanz F, Morante JR
Journal of the Electrochemical Society, 144(3), 909, 1997
5 Critical-Review - Adhesion in Surface Micromechanical Structures
Maboudian R, Howe RT
Journal of Vacuum Science & Technology B, 15(1), 1, 1997
6 Copper Deposition on HF Etched Silicon Surfaces - Morphological and Kinetic-Studies
Chyan OM, Chen JJ, Chien HY, Sees J, Hall L
Journal of the Electrochemical Society, 143(1), 92, 1996
7 Effect of Surface Pretreatment of Submicron Contact Hole on Selective Tungsten Chemical-Vapor-Deposition
Yeh WK, Chen MC, Lin MS
Journal of Vacuum Science & Technology B, 14(1), 167, 1996
8 Potential-Modulation-Induced Microwave Reflectivity Measurements on Silicon in Fluoride Solutions
Schlichthorl G, Peter LM
Journal of Electroanalytical Chemistry, 381(1-2), 55, 1995
9 Posttreatment Effects on Electrical-Conduction in Porous Silicon
Moller F, Benchorin M, Koch F
Thin Solid Films, 255(1-2), 16, 1995
10 Chemistry of Silicon Surfaces After Wet Chemical Preparation - A Thermodesorption Spectroscopy Study
Pietsch GJ, Kohler U, Henzler M
Journal of Vacuum Science & Technology B, 12(1), 78, 1994