화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Relating residual stress to thin film growth processes via a kinetic model and real-time experiments
Chason E, Engwall AM
Thin Solid Films, 596, 2, 2015
2 Imposition of defined states of stress on thin films by a wafer-curvature method; validation and application to aging Sn films
Stein J, Pascher M, Welzel U, Huegel W, Mittemeijer EJ
Thin Solid Films, 568, 52, 2014
3 A kinetic analysis of residual stress evolution in polycrystalline thin films
Chason E
Thin Solid Films, 526, 1, 2012
4 Stress and microstructure evolution during growth of magnetron-sputtered low-mobility metal films: Influence of the nucleation conditions
Fillon A, Abadias G, Michel A, Jaouen C
Thin Solid Films, 519(5), 1655, 2010
5 Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers
Janssen GCAM, Abdalla MM, van Keulen F, Pujada BR, van Venrooy B
Thin Solid Films, 517(6), 1858, 2009
6 In situ stress measurements during the electrochemical adsorption/desorption of self-assembled monolayers
Zangmeister CD, Bertocci U, Beauchamp CR, Stafford GR
Electrochimica Acta, 53(23), 6778, 2008
7 Stress and strain in polycrystalline thin films
Janssen GCAM
Thin Solid Films, 515(17), 6654, 2007