화학공학소재연구정보센터
검색결과 : 6건
No. Article
1 Recommended practice for process sampling for partial pressure analysis
Blessing JE, Ellefson RE, Raby BA, Brucker GA, Waits RK
Journal of Vacuum Science & Technology A, 25(1), 167, 2007
2 Edison's vacuum technology patents
Waits RK
Journal of Vacuum Science & Technology A, 21(4), 881, 2003
3 Evolution of integrated-circuit vacuum processes: 1959-1975 (vol 18, pg 1736, 2000)
Waits RK
Journal of Vacuum Science & Technology A, 19(1), 388, 2001
4 Edison's vacuum coating patents
Waits RK
Journal of Vacuum Science & Technology A, 19(4), 1666, 2001
5 Evolution of integrated-circuit vacuum processes: 1959-1975
Waits RK
Journal of Vacuum Science & Technology A, 18(4), 1736, 2000
6 Semiconductor and thin film applications of a quadrupole mass spectrometer
Waits RK
Journal of Vacuum Science & Technology A, 17(4), 1469, 1999