검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Direct die-to-database electron beam inspection of fused silica imprint templates Resnick DJ, Myron LJ, Thompson E, Hasebe T, Tokumoto T, Yan C, Yamamoto M, Wakamori H, Inoue M, Ainley E, Nordquist KJ, Dauksher WJ Journal of Vacuum Science & Technology B, 24(6), 2979, 2006 |