검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Low temperature plasma etching for Si3N4 waveguide applications Celo D, Vandusen R, Smy T, Albert J, Tarr NG, Waldron PD Journal of Vacuum Science & Technology A, 26(2), 253, 2008 |
| 2 |
Optical modulator in silicon-on-insulator with a low thermal signature Waldron PD, Jessop PE, Yuen AP, Winchiu L, Chyurlia P, Tarr NG, Smy TJ, Golub I, Xu DX, Janz S Journal of Vacuum Science & Technology A, 22(3), 800, 2004 |