검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Selectivity switch concept in Cu chemical mechanical planarization and its implementation on orbital tools Gotkis Y, Alamgir S, Yang L, Dai F, Mitchell F, Nguyen J, Shumway L, Walesa LR, Yang J, Nunan P, Holland K Journal of Vacuum Science & Technology B, 17(5), 2262, 1999 |