검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Near-surface secondary-ion-mass-spectrometry analyses of plasma-based B ion implants in Si Buyuklimanli TH, Magee CW, Marino JW, Walther SR Journal of Vacuum Science & Technology B, 24(1), 408, 2006 |
| 2 |
Surface Metal Contamination During Ion-Implantation - Comparison of Measurements by Secondary-Ion Mass-Spectroscopy, Total-Reflection X-Ray-Fluorescence Spectrometry, and Vapor-Phase Decomposition Used in Conjunction with Graphite-Furnace Atomic-Absorption Spectrometry and Inductively-Coupled Plasma-Mass Spectrometry Frost MR, Harrington WL, Downey DF, Walther SR Journal of Vacuum Science & Technology B, 14(1), 329, 1996 |