검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Surface morphology evolution during sputter deposition of thin films -lattice Monte Carlo simulations Zepeda-Ruiz LA, Gilmer GH, Walton CC, Hamza AV, Chason E Journal of Crystal Growth, 312(8), 1183, 2010 |
| 2 |
Boron-carbide barrier layers in scandium-silicon multilayers Jankowski AF, Saw CK, Walton CC, Hayes JP, Nilsen J Thin Solid Films, 469-470, 372, 2004 |
| 3 |
Evaluation of the cleanliness of the ion-assisted Mo-Si deposition process for extreme ultraviolet lithography Hau-Riege SP, Mirkarimi PB, Walton CC, Sperry V, Larson C Journal of Vacuum Science & Technology B, 21(6), 2466, 2003 |
| 4 |
Actinic detection of sub-100 nm defects on extreme ultraviolet lithography mask blanks Jeong ST, Johnson L, Rekawa S, Walton CC, Prisbrey ST, Tejnil E, Underwood JH, Bokor J Journal of Vacuum Science & Technology B, 17(6), 3009, 1999 |