화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Electrical conduction and TDDB reliability characterization for low-k SiCO dielectric in Cu interconnects
Wang RCJ, Chang-Liao KS, Wang TK, Chang MN, Wang CS, Lin CH, Lee CC, Chiu CC, Wu K
Thin Solid Films, 517(3), 1230, 2008
2 Resistance characterization of Cu stress-induced void migration at narrow metal finger connected with wide lead
Wang RCJ, Chang-Liao KS, Wang TK, Lee CC, Lin JH, Oates AS, Lee SC, Wu K
Thin Solid Films, 516(2-4), 449, 2007