검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Neutral particle proximity lithography: Noncontact nanoscale printing without charge-related artifacts Craver B, Nounu H, Wasson J, Wolfe JC Journal of Vacuum Science & Technology B, 26(6), 1866, 2008 |
| 2 |
Effects of smoothing on defect printability at extreme ultraviolet wavelengths Cardinale GF, Ray-Chaudhuri AK, Fisher A, Mangat PSJ, Wasson J, Mirkarimi PB, Gullikson E Journal of Vacuum Science & Technology B, 18(6), 2944, 2000 |
| 3 |
Directly sputtered stress-compensated carbon protective layer for silicon stencil masks Hudek P, Hrkut P, Drzik M, Kostic I, Belov M, Torres J, Wasson J, Wolfe JC, Degen A, Rangelow IW, Voigt J, Butschke J, Letzkus F, Springer R, Ehrmann A, Kaesmaier R, Kragler K, Mathuni J, Haugeneder E, Loschner H Journal of Vacuum Science & Technology B, 17(6), 3127, 1999 |
| 4 |
Fabrication of silicon stencil masks with vitreous carbon ion-absorbing coatings Ruchhoeft P, Wolfe JC, Wasson J, Torres J, Wu H, Nounu H, Liu N, Herbordt M, Morgan MD, Tiberio RC Journal of Vacuum Science & Technology B, 16(6), 3599, 1998 |