검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Practical approach to separating the pattern generator-induced mask CD errors from the blank/process-induce mask CD errors using conventional market measurements Han LQ, Wang WD, McCord MA, Berglund CN, Pease RFW, Weaver LS Journal of Vacuum Science & Technology B, 15(6), 2243, 1997 |