화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Growth of thick p-type SiC epitaxial layers by halide chemical vapor deposition
Fanton MA, Weiland BE, Redwing JM
Journal of Crystal Growth, 310(18), 4088, 2008
2 Growth of 6H-SiC crystals with low boron concentration
Fanton MA, Cavalero RL, Weiland BE, Ray RG, Snyder DW, Gamble RD, Oslosky EJ, Everson WJ
Journal of Crystal Growth, 287(2), 363, 2006
3 Growth kinetics study in halide chemical vapor deposition of SiC
Nigam S, Chung HJ, Polyakov AY, Fanton MA, Weiland BE, Snyder DW, Skowronski M
Journal of Crystal Growth, 284(1-2), 112, 2005