검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of strontium titanate films from Sr((Pr3Cp)-Pr-i)(2), Ti[N(CH3)(2)](4) and H2O Rentrop S, Moebus T, Abendroth B, Strohmeyer R, Schmid A, Weling T, Hanzig J, Hanzig F, Stocker H, Meyer DC Thin Solid Films, 550, 53, 2014 |
| 2 |
Atomic layer deposition of TiO2 from tetrakis(dimethylamino) titanium and H2O Abendroth B, Moebus T, Rentrop S, Strohmeyer R, Vinnichenko M, Weling T, Stocker H, Meyer DC Thin Solid Films, 545, 176, 2013 |