검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Smooth Reactive Ion Etching of GaAs Using a Hydrogen Plasma Pretreatment Choquette KD, Shul RJ, Howard AJ, Rieger DJ, Freund RS, Wetzel RC Journal of Vacuum Science & Technology B, 13(1), 40, 1995 |
| 2 |
Hydrogen Plasma Processing of GaAs and AlGaAs Choquette KD, Freund RS, Hong M, Luftman HS, Chu SN, Mannaerts JP, Wetzel RC Journal of Vacuum Science & Technology B, 11(6), 2025, 1993 |