검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Influence of titanium-substrate roughness on Ca-P-O thin films grown by atomic layer deposition Sagari ARA, Malm J, Laitinen M, Rahkila P, Ma HQ, Putkonen M, Karppinen M, Whitlow HJ, Sajavaara T Thin Solid Films, 531, 26, 2013 |
| 2 |
Aperture-edge scattering in MeV ion-beam lithography. I. Scattering from a straight Ta aperture edge Gorelick S, Sajavaara T, Whitlow HJ Journal of Vacuum Science & Technology B, 27(3), 1101, 2009 |
| 3 |
Aperture-edge scattering in MeV ion-beam lithography. II. Scattering from a rectangular aperture Gorelick S, Sajavaara T, Whitlow HJ Journal of Vacuum Science & Technology B, 27(3), 1109, 2009 |
| 4 |
Atomic layer deposition and characterization of biocompatible hydroxyapatite thin films Putkonen M, Sajavaara T, Rahkila P, Xu LT, Cheng SL, Niinisto L, Whitlow HJ Thin Solid Films, 517(20), 5819, 2009 |
| 5 |
Programmable proximity aperture lithography with MeV ion beams Puttaraksa N, Gorelick S, Sajavaara T, Laitinen M, Singkarat S, Whitlow HJ Journal of Vacuum Science & Technology B, 26(5), 1732, 2008 |
| 6 |
Recoil Spectrometry of Thin-Film Reactions in the Pd/InP System Persson L, Elbouanani M, Hult M, Jonsson P, Whitlow HJ, Andersson M, Georgsson K, Bubb IF, Johnston PN, Walker SR, Cohen DD, Dytlewski N, Zaring C, Ostling M Journal of Vacuum Science & Technology A, 14(4), 2405, 1996 |