검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Annealing of electron beam induced deposits of platinum from Pt(PF3)(4) Ervin MH, Chang D, Nichols B, Wickenden A, Barry J, Melngailis J Journal of Vacuum Science & Technology B, 25(6), 2250, 2007 |
| 2 |
Electron beam induced deposition of low resistivity platinum from Pt(PF3)(4) Barry JD, Ervin M, Molstad J, Wickenden A, Brintlinger T, Hoffman P, Meingailis J Journal of Vacuum Science & Technology B, 24(6), 3165, 2006 |
| 3 |
Mitigation of residual film stress deformation in multilayer microelectromechanical systems cantilever devices Pulskamp JS, Wickenden A, Polcawich R, Piekarski B, Dubey M, Smith G Journal of Vacuum Science & Technology B, 21(6), 2482, 2003 |