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| No. | Article |
|---|---|
| 1 |
Thermal stability and hydrogen atom induced etching of nanometer-thick a-Si : H films grown by ion-beam deposition on Si(100) surfaces Biener J, Lutterloh C, Wicklein M, Dinger A, Kuppers J Journal of Vacuum Science & Technology A, 21(4), 831, 2003 |