검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Fabrication and characterization of p-type silicon field-emitter arrays for lithography Teepen TF, van Veen AHV, van't Spijker H, Steenbrink SWHK, van Zuuk A, Heerkens CTH, Wieland MJ, van Druten NJ, Kruit P Journal of Vacuum Science & Technology B, 23(2), 359, 2005 |
| 2 |
Resolution of the multiple aperture pixel by pixel enhancement of resolution electron lithography concept Kampherbeek BJ, Wieland MJ, Kruit P Journal of Vacuum Science & Technology B, 18(1), 117, 2000 |