검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Fabrication and characterization of a capacitive micromachined shunt switch Firebaugh SL, Charles HK, Edwards RL, Keeney AC, Wilderson SF Journal of Vacuum Science & Technology A, 22(4), 1383, 2004 |
| No. | Article |
|---|---|
| 1 |
Fabrication and characterization of a capacitive micromachined shunt switch Firebaugh SL, Charles HK, Edwards RL, Keeney AC, Wilderson SF Journal of Vacuum Science & Technology A, 22(4), 1383, 2004 |