검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Shot-noise and edge roughness effects in resists patterned at 10 nm exposure Rau N, Stratton F, Fields C, Ogawa T, Neureuther A, Kubena R, Willson G Journal of Vacuum Science & Technology B, 16(6), 3784, 1998 |
| No. | Article |
|---|---|
| 1 |
Shot-noise and edge roughness effects in resists patterned at 10 nm exposure Rau N, Stratton F, Fields C, Ogawa T, Neureuther A, Kubena R, Willson G Journal of Vacuum Science & Technology B, 16(6), 3784, 1998 |