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| No. | Article |
|---|---|
| 1 |
Comparison of fast three-dimensional simulation and actinic inspection for extreme ultraviolet masks with buried defects and absorber features Clifford CH, Wiraatmadja S, Chan TT, Neureuther AR, Goldberg KA, Mochi I, Liang T Journal of Vacuum Science & Technology B, 27(6), 2888, 2009 |