검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Model approximation and stabilization of reactive sputter processes Woelfel C, Bockhorn D, Awakowicz P, Lunze J Journal of Process Control, 83, 121, 2019 |
| 2 |
Model approximation and stabilization of reactive sputter processes Woelfel C, Bockhorn D, Awakowicz P, Lunze J Journal of Process Control, 83, 121, 2019 |