검색결과 : 8건
| No. | Article |
|---|---|
| 1 |
Analysis of lattice distortions in high-quality InGaAsP epitaxial overgrowth of rectangular-patterned INP gratings U'Ren GD, Goorsky MS, Koontz EM, Lim MH, Petrich GS, Kolodziejski LA, Wong VV, Smith HI, Matney KM, Wormington M Journal of Vacuum Science & Technology B, 16(3), 1381, 1998 |
| 2 |
Resist Planarization over Topography Using Ion-Implantation Wong VV, Yasaka A, Smith HI Journal of Vacuum Science & Technology B, 13(6), 2797, 1995 |
| 3 |
Distributed Bragg Grating Integrated-Optical Filters - Synthesis and Fabrication Wong VV, Ferrera J, Damask JN, Murphy TE, Smith HI, Haus HA Journal of Vacuum Science & Technology B, 13(6), 2859, 1995 |
| 4 |
Spatial-Phase-Locked Electron-Beam Lithography and X-Ray-Lithography Fabricating First-Order Gratings on Rib Wave-Guides Wong VV, Ferrera J, Damask JN, Carter JM, Moon EE, Haus HA, Smith HI, Rishton S Journal of Vacuum Science & Technology B, 12(6), 3741, 1994 |
| 5 |
Printability of Sub-150 nm Features in X-Ray-Lithography - Theory and Experiments Hector SD, Wong VV, Smith HI, Mccord MA, Rhee KW Journal of Vacuum Science & Technology B, 12(6), 3965, 1994 |
| 6 |
High-Performance Self-Aligned Sub-100 nm Metal-Oxide-Semiconductor Field-Effect Transistors Using X-Ray-Lithography Yang IY, Hu H, Su LT, Wong VV, Burkhardt M, Moon EE, Carter JM, Antoniadis DA, Smith HI, Rhee KW, Chu W Journal of Vacuum Science & Technology B, 12(6), 4051, 1994 |
| 7 |
Spatial-Phase-Locked Electron-Beam Lithography - Initial Test-Results Ferrera J, Wong VV, Rishton S, Boegli V, Anderson EH, Kern DP, Smith HI Journal of Vacuum Science & Technology B, 11(6), 2342, 1993 |
| 8 |
Ridge-Wave-Guide Sidewall-Grating Distributed-Feedback Structures Fabricated by X-Ray-Lithography Wong VV, Choi WY, Carter JM, Fonstad CG, Smith HI, Chung Y, Dagli N Journal of Vacuum Science & Technology B, 11(6), 2621, 1993 |