검색결과 : 16건
| No. | Article |
|---|---|
| 1 |
Actinic inspection of extreme ultraviolet programed multilayer defects and cross-comparison measurements Goldberg KA, Barty A, Liu YW, Kearney P, Tezuka Y, Terasawa T, Taylor JS, Han HS, Wood OR Journal of Vacuum Science & Technology B, 24(6), 2824, 2006 |
| 2 |
Ultrathin membrane masks for electron projection lithography Wood OR, Trybula WJ, Greschner J, Kalt S, Bayer T, Shimizu S, Yamamoto H, Suzuki K, Gordon MS, Robinson CF, Dhaliwal RS, Thiel CW, Caldwell N, Lawliss MS, Huang C Journal of Vacuum Science & Technology B, 22(6), 3072, 2004 |
| 3 |
Assessment of image placement errors induced in electron projection lithography masks by chucking Chang J, Engelstad RL, Lovell EG, Trybula WJ, Wood OR Journal of Vacuum Science & Technology B, 22(6), 3077, 2004 |
| 4 |
Benchmarking stencil reticles for electron projection lithography Wood OR, Trybula WJ, Lercel MJ, Thiel CW, Lawliss MJ, Edinger K, Stanishevsky A, Shimizu S, Kawata S Journal of Vacuum Science & Technology B, 21(6), 3072, 2003 |
| 5 |
Electron projection lithography mask format layer stress measurement and simulation of pattern transfer distortion Reu PL, Chen CF, Engelstad RL, Lovell EG, Bayer T, Greschner J, Kalt S, Weiss H, Wood OR, Mackay RS Journal of Vacuum Science & Technology B, 20(6), 3053, 2002 |
| 6 |
Adaptive alignment of photomasks for overlay improvement Chen CF, Engelstad RL, Lovell EG, White DL, Wood OR, Smith MK, Harriott LR Journal of Vacuum Science & Technology B, 20(6), 3099, 2002 |
| 7 |
Novel alignment system for imprint lithography White DL, Wood OR Journal of Vacuum Science & Technology B, 18(6), 3552, 2000 |
| 8 |
Technique for rapid at-wavelength inspection of extreme ultraviolet mask blanks Spector SJ, White DL, Tennant DM, Ocola LE, Novembre AE, Peabody ML, Wood OR Journal of Vacuum Science & Technology B, 17(6), 3003, 1999 |
| 9 |
Lithographic projectors with dark-field illumination White DL, Cirelli RA, Spector SJ, Wood OR Journal of Vacuum Science & Technology B, 17(6), 3301, 1999 |
| 10 |
Evaluation of a two-mask resolution enhancement technique White DL, Wood OR Journal of Vacuum Science & Technology B, 16(6), 3411, 1998 |