검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Cross-sectional thin film characterization of Si compounds in semiconductor device structures using both elemental and ELNES mapping by EFTEM Worch M, Engelmann HJ, Blum W, Zschech E Thin Solid Films, 405(1-2), 198, 2002 |
| No. | Article |
|---|---|
| 1 |
Cross-sectional thin film characterization of Si compounds in semiconductor device structures using both elemental and ELNES mapping by EFTEM Worch M, Engelmann HJ, Blum W, Zschech E Thin Solid Films, 405(1-2), 198, 2002 |