검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Comparative study of thermally cured and electron-beam-exposed hydrogen silsesquioxane resists Choi S, Word MJ, Kumar V, Adesida I Journal of Vacuum Science & Technology B, 26(5), 1654, 2008 |
| 2 |
Nanometer-period gratings in hydrogen silsesquioxane fabricated by electron beam lithography Word MJ, Adesida I, Berger PR Journal of Vacuum Science & Technology B, 21(6), L12, 2003 |