검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Detailed analysis of the influence of an inductively coupled plasma reactive-ion etching process on the hole depth and shape of photonic crystals in InP/InGaAsP Strasser P, Wuest R, Robin F, Erni D, Jackel H Journal of Vacuum Science & Technology B, 25(2), 387, 2007 |
| 2 |
Fabrication of a hard mask for InP based photonic crystals: Increasing the plasma-etch selectivity of poly(methyl methacrylate) versus SiO2 and SiNx Wuest R, Strasser P, Robin F, Erni D, Jackel H Journal of Vacuum Science & Technology B, 23(6), 3197, 2005 |