검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
P implantation into preamorphized germanium and subsequent annealing: Solid phase epitaxial regrowth, P diffusion, and activation Posselt M, Schmidt B, Anwand W, Grotzschel R, Heera V, Mucklich A, Wundisch C, Skorupa W, Hortenbach H, Gennaro S, Bersani M, Giubertoni D, Moller A, Bracht H Journal of Vacuum Science & Technology B, 26(1), 430, 2008 |